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US Patent 11715803 Method of forming transistors of different configurations

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
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Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
117158030
Date of Patent
August 1, 2023
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Patent Application Number
178385600
Date Filed
June 13, 2022
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Patent Citations
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US Patent 9947804 Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structure
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US Patent 9991352 Methods of forming a nano-sheet transistor device with a thicker gate stack and the resulting device
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US Patent 10032627 Method for forming stacked nanowire transistors
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US Patent 10109721 Horizontal gate-all-around device having wrapped-around source and drain
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US Patent 10134840 Series resistance reduction in vertically stacked silicon nanowire transistors
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US Patent 10157799 Multi-gate device and method of fabrication thereof
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US Patent 10199502 Structure of S/D contact and method of making same
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US Patent 10290546 Threshold voltage adjustment for a gate-all-around semiconductor structure
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...
Patent Primary Examiner
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Earl N Taylor
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CPC Code
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H01L 29/0673
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H01L 29/42392
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H01L 29/66439
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H01L 29/66545
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H01L 29/6656
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H01L 29/78696
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H01L 29/1033
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H01L 29/66575
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...

The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.

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