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US Patent 11694944 3D semiconductor device and structure with metal layers and a connective path

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116949440
Date of Patent
July 4, 2023
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Patent Application Number
181092540
Date Filed
February 13, 2023
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Patent Citations
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US Patent 7470142 Wafer bonding method
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US Patent 8432751 Memory cell using BTI effects in high-k metal gate MOS
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US Patent 8455941 Nonvolatile semiconductor memory device and method for manufacturing the same
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US Patent 8470689 Method for forming a multilayer structure
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US Patent 8497512 Light-emitting device and manufacturing method thereof
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US Patent 8501564 Semiconductor element, semiconductor device, and method for manufacturing the same
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US Patent 8507972 Nonvolatile semiconductor memory device
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US Patent 8514623 Method of maintaining the state of semiconductor memory having electrically floating body transistor
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Patent Citations Received
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US Patent 11967583 3D semiconductor device and structure with metal layers
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US Patent 11881443 3D semiconductor device and structure with metal layers and a connective path
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Patent Primary Examiner
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John P. Dulka
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CPC Code
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H01L 23/544
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H01L 27/0207
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H01L 27/0688
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H01L 27/088
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H01L 27/0886
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H01L 27/11807
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H01L 29/1066
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H01L 29/66272
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A 3D semiconductor device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where the via includes contact with at least one of the plurality of transistors.

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