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US Patent 10600885 Vertical fin field effect transistor devices with self-aligned source and drain junctions

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Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10600885
Date of Patent
March 24, 2020
Patent Application Number
16105442
Date Filed
August 20, 2018
Patent Citations Received
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US Patent 11978783 Vertical fin field effect transistor devices with reduced top source/drain variability and lower resistance
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US Patent 11404412 Semiconductor device
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US Patent 11424343 Vertical fin field effect transistor devices with self-aligned source and drain junctions
0
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US Patent 11854803 Gate spacer patterning
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US Patent 10916638 Vertical fin field effect transistor devices with reduced top source/drain variability and lower resistance
0
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US Patent 11749678 Semiconductor device
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US Patent 11380778 Vertical fin field effect transistor devices with self-aligned source and drain junctions
Patent Primary Examiner
‌
Bilkis Jahan
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