Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Aritra Dasgupta0
Oleg Gluschenkov0
Date of Patent
February 4, 2020
0Patent Application Number
158190920
Date Filed
November 21, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Semiconductor structures and methods of fabricating the same using multiple nanosecond pulsed laser anneals are provided. The method includes exposing a gate stack formed on a semiconducting material to multiple nanosecond laser pulses at a peak temperature below a melting point of the semiconducting material.
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