Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Albert Rogers Ellingboe0
Date of Patent
February 15, 2011
0Patent Application Number
119141110
Date Filed
May 11, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A plasma source is described. The source includes a reactive impedance element formed from a plurality of electrodes. By providing such a plurality of electrodes and powering adjacent electrodes out of phase with one another, it is possible to improve the characteristics of the plasma generated.
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